SOURCE OF IONS OF METALS Russian patent published in 1995 - IPC

FIELD: generation of metal ion beams. SUBSTANCE: source of ions is based on self-sustained discharge contracted in crossed electric and magnetic fields. Between cathode and accelerating electrode there is inserted disc with central hole in the form of ellipse with eccentrically close to one making poles of additional magnetic system with cathode wall having same hole. Distance h between poles should meet relationship (h+2a)/[(b-t)2]=1, where 2a is thickness of poles of additional magnetic system, b is length of small semi-axis of ellipse; t is thickness of insert from ion-forming material put on poles (on walls of holes) and overlapping interpole gap. Additional magnetic system is electrically isolated and potential negative relative to cathode is fed to it. EFFECT: improved reliability of generation of ribbon beams of ions of refractory metals with high factor of usage of working substance and content of ions of metal in beam, prolonged service life of source of ions. 1 dwg