FIELD: electronic and ion-ray equipment. SUBSTANCE: device for generation and extraction of pulse beams of corpuscular particles has particle source 1 with outlet hole, cylindrical body divided into leak-proof chambers 6 and 7 pumped separately and intercommunicating through flight hole 8, rotation drive of cylindrical body including element 10 to change rotation phase of cylindrical body relative to drive in the form of clutch composed of sprocket and wedge moving along axle of drive and pumping aid in the form of displacement pumps. Cylindrical body has flight holes 4 and 5 for extraction of beam. EFFECT: enhanced power of extracted particles. 2 cl, 1 dwg
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Authors
Dates
1998-04-20—Published
1986-05-26—Filed