BEAM-PLASMA MICROWAVE DEVICE (VERSIONS) Russian patent published in 2008 - IPC H01J27/16 

FIELD: electric engineering.

SUBSTANCE: invention may be used in scientific and applied instruments. Beam-plasma micro-wave devices includes, in axial alignment, grounded vacuum vessel where ion pump and getter pumps of differential pumping system are situated in serial arrangement along device axis, electro dynamical system with slow-down structure connected with hydrogen generator and represented with a series of resonators linked with axial interim channel, SHF energy inputs and outputs, electron gun attached to vacuum vessel from the side of ion pump, collector isolated electrically from vacuum vessel and linked to this vessel from the side of linked resonators, and sectional solenoid. Options of microwave device provide for displacing proper electrode systems in vacuum vessel hollows in front of and behind linked resonators. Such arrangement allows for getting reliable information about pressure at the stage of device preparation for operation, and about plasma concentration in interim channel areas at the stage of operation in plasma mode. Additionally, one of beam-plasma microwave device options provides for self-cleaning of electrodes in electrode systems according to option. The other option enables controlling of electrode systems performance used in device.

EFFECT: highly accurate stabilisation of output SHF power, reduction of device startup period while reducing average power consumption by ion pump and hydrogen generator and decreasing hydrogen flow rate and increasing generator life-time.

3 cl, 3 dwg