Patenton — panteon of patents

(19)

SU

(11)

1 419 418

(13)

A1

(51)

IPC

(21) (22)

Application

4177468/25, 1987-01-12

(22)

Actual filing date

1987-01-12

(45)

Published

1995-06-09

(72)

Inventor

Vakhtel' V.M.Gitlin V.R.Evseev I.I.Ivakin A.N.Kadmenskij S.G.Levin M.N.Ostroukhov S.S.Stojanov A.I.

METHOD FOR MANUFACTURING OF FIELD-EFFECT TRANSISTOR Russian patent published in 1995 - IPC

Abstract SU 1419418 A1

FIELD: electronic devices. SUBSTANCE: method involves forming areas of source, drain and under-gate dielectric on silicon base, forming metal conductors, tuning threshold voltage Vth by means of exposition to X-ray radiation which level is proportional to ΔVth. Base having generated structures is exposed to given level of radiation together with its heating to temperature of 400-500 C. EFFECT: facilitated manufacturing, increased stability to temperature. 2 cl

Similar patents SU1419418A1

Title Year Author Number
METHOD FOR MANUFACTURING FIELD-EFFECT TRANSISTORS 1986
  • Vakhtel' V.M.
  • Gitlin V.R.
  • Ivakin A.N.
  • Kadmenskij A.G.
  • Kadmenskij S.G.
  • Mokshin A.N.
  • Ostroukhov S.S.
 RU1499614C
MANUFACTURING PROCESS FOR MIS LARGE-SCALE INTEGRATED CIRCUITS 1985
  • Gitlin V.R.
  • Kadmenskij S.G.
  • Vakhtel' V.M.
  • Ivakin A.N.
  • Ostroukhov S.S.
 SU1384106A2
PROCESS OF MANUFACTURE OF MIS LSI CIRCUITS 1991
  • Gitlin V.R.
  • Ivakin A.N.
  • Kadmenskij S.G.
  • Ostroukhov S.S.
 RU2017265C1
PROCESS OF MANUFACTURE OF MIS LARGE-SCALE INTEGRATED CIRCUITS 1987
  • Achkasov V.N.
  • Vakhtel' V.M.
  • Gitlin V.R.
  • Ivakin A.N.
  • Kadmenskij S.G.
  • Levin M.N.
  • Ostroukhov S.S.
 RU1519452C
PROCESS OF MANUFACTURE OF MIS LARGE-SCALE INTEGRATED CIRCUITS 1990
  • Gitlin V.R.
  • Ivakin A.N.
  • Kadmenskij S.G.
  • Levin M.N.
  • Ostroukhov S.S.
  • Tatarintsev A.V.
 SU1762688A1
METHOD OF MANUFACTURING IGFET LARGE-SCALE INTEGRATED CIRCUIT 0
  • Krasnozhon A.I.
  • Sukhorukov N.I.
 SU1295971A1
METHOD OF MANUFACTURING MUTUALLY ADDING METAL-OXIDE-SEMICONDUCTOR TRANSISTOR DEVICES 0
  • Zelentsov A.V.
  • Pankratov A.L.
  • Selkov E.S.
  • Trushin V.V.
 SU1023969A1
METHOD OF MANUFACTURING INTEGRAL IGFET 0
  • Glushchenko V.N.
 SU865053A1
PROCESS OF MANUFACTURE OF P-CHANNEL MIS LSICS 1989
  • Matveev I.V.
  • Barabanov M.F.
  • Meshcherjakov N.Ja.
 SU1752142A1
METHOD OF MANUFACTURING LARGE-SCALE INTEGRATION CIRCUITS USING METAL-INSULATOR-SEMICONDUCTORS 0
  • Bulgakov S.S.
  • Vyglovskij V.M.
  • Lebedev Yu.P.
  • Sonov G.V.
 SU670019A1

SU 1 419 418 A1

Authors

Vakhtel' V.M.

Gitlin V.R.

Evseev I.I.

Ivakin A.N.

Kadmenskij S.G.

Levin M.N.

Ostroukhov S.S.

Stojanov A.I.

Dates

1995-06-09—Published

1987-01-12—Filed

read Similar patents