ELECTRIC ARC EVAPORATOR WITH MAGNETIC CONTROL OVER EVAPORATION ZONE Russian patent published in 1994 - IPC

FIELD: vacuum and evaporation equipment. SUBSTANCE: invention makes it possible to enhance reliability and stability of initiation of arc discharge by formation of magnetic leakage fields in zone of firing device sufficient to keep arc discharge at moment of initiation independent of relative positions of point of puncture of insulator of firing device initiating arc and key rotatory controlling magnetic field on surface of evaporated cathode. Magnetic leakage fields are formed with the aid of through holes in pole piece of magnetic system. Holes are positioned uniformly over circumference of cylindrical pole piece and are in plane of face of cathode and firing device. Summary length l of holes meets relation Πd/3<l<2Πd/3, where d is outer diameter of pole piece and width h lies within interval H/2<h<H, where H is width of interpole slit gap. EFFECT: enhanced reliability and stability of initiation of arc discharge. 1 dwg