VACUUM-ARC EVAPORATOR FOR GENERATION OF CATHODE PLASMA Russian patent published in 2014 - IPC C23C14/35 

FIELD: electricity.

SUBSTANCE: vacuum-arc evaporator is intended for generation of cathode plasma and can be used for obtaining different types of coatings or films of different purpose by deposition of ions of a plasma flow on surface of treated items. The vacuum-arc evaporator includes an anode, an electromagnetic coil enveloping the housing in the form of a piece of a pipe, a cylindrical cathode, a ferromagnetic ring enveloping the cathode near its evaporated end surface, a ferromagnetic sleeve that envelops the cathode holder. In order to increase operating efficiency of the evaporator, it is equipped with additional annular ferromagnetic elements. These elements together with a ferromagnetic screen reduce scattered magnetic fields of the electromagnetic coil and provide for considerable increase of magnetic field intensity on the evaporated surface of the cathode without any increase in the electrical coil of the number of ampere turns.

EFFECT: increasing intensity of a magnetic field on a working end of the cathode provides for high stability of an arc discharge, rise of output ionic current, as well as reduction of a drop phase in erosion products of the cathode due to increase of movement speed of cathode spots of the arc.

5 cl, 2 dwg