FIELD: metallurgy.
SUBSTANCE: arc evaporator comprises long cylindrical cooled cathode, anode, firing and quenching electrodes and power supply. Cooled anode is shaped to cylinder. Anode and cathode are arranged and aligned at common flange. Said cathode is arranged inside anode while clearance there between is defined by the following relation: Da/Dc = 3-7, where Da and Dc are anode and cathode diameters. Slot in width not over 1/4 of anode circumference is made along anode side surface generatrix. To allow material evaporation in preset direction said anode is equipped with electromagnetic arranged diametrically opposite said slot.
EFFECT: higher reliability, increased rate of coat growth, higher efficiency.
2 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| ELECTRIC ARC EVAPORIZER FOR METALS AND ALLOYS | 0 |
|
SU901358A1 |
| ELECTRIC ARC EVAPORATOR TO DEPOSIT COATS IN VACUUM | 1993 |
|
RU2077604C1 |
| DEVICE FOR DEPOSITION OF THIN FILMS IN VACUUM | 1992 |
|
RU2066704C1 |
| METAL PLASMA SOURCE (VERSIONS) | 2015 |
|
RU2601725C1 |
| ELECTROARC EVAPORATOR BY A,N,RUDNEV | 0 |
|
SU1831515A3 |
| VACUUM ARC PLASMA SOURCE | 1992 |
|
RU2053311C1 |
| VACUUM-ARC EVAPORATOR FOR GENERATION OF CATHODE PLASMA | 2012 |
|
RU2536126C2 |
| VACUUM-ARC DEVICE | 2010 |
|
RU2449513C1 |
| PLANT FOR APPLICATION OF COATS | 2004 |
|
RU2280709C2 |
| ELECTRIC-ARC EVAPORATOR | 0 |
|
SU1123313A1 |
