METHOD AND DEVICE FOR MEASURING DISTRIBUTION OF ILLUMINANCE Russian patent published in 1994 - IPC

FIELD: semiconductor engineering. SUBSTANCE: method is based upon transforming illuminance to distribution currents of elementary cells, separating currents of elementary cells to two groups by zero potential line, amplifying current from single group to K₁ times, subtracting of amplified currents, integrating result of subtraction in time, controlling position of zero potential line corresponding to result of subtraction, measuring value of output voltage of multiscan. Total current of all the cells of multiscan is amplified into K(n

ⁿ⁾ times corresponding to program of measurement, moreover, value K(nⁿ⁾ is selected to satisfy to relation K(nⁿ⁾/K₁≅1, where n is number of measurements. Subtraction of amplified current of single group of elementary cells is performed from amplified total current of all cells. Result of subtraction is integrated and simultaneously compared with preset value of residual current. Separation, amplification, subtraction, integration, zero potential line control and measurement is carried out N times (n= 1, 2, 3 . . . . , N), moreover, change in value of coefficient K(nⁿ⁾ is performed in moment when value of subtraction result is fixed to be equal to value of residual current. Value of output voltage is measured in the same moment. EFFECT: improved truth of information of measurements. 2 cl, 1 dwg