Patenton — panteon of patents

(19)

SU

(11)

1 746 698

(13)

A1

(51)

IPC

(21) (22)

Application

4838289/05, 1990-06-11

(22)

Actual filing date

1990-06-11

(45)

Published

1994-01-15

(72)

Inventor

Andrjushenko L.A.Grinev B.V.Sotnikov V.T.Gershun A.S.Nikulina R.A.Kakhidze G.P.Juzhelevskij Ju.A.Lebedeva Z.S.

POLISHING COMPOSITION Russian patent published in 1994 - IPC

Abstract SU 1746698 A1

FIELD: final polishing of semiconductor substrates. SUBSTANCE: composition contains 40-50 % of low-molecular weight polyorganosiloxane rubber, 4-10 % of orthosilicic acid ester and 40-56 % of aluminum α-oxide. For the preparation of polishing composition all ingredients are mixed together. EFFECT: high quality of substrate surface to be treated. 3 tbl

Similar patents SU1746698A1

Title Year Author Number
METHOD OF MANUFACTURING ALKALINE-HALOID SCINTILLATORS 1991
  • Andrjushchenko L.A.
  • Gershun A.S.
  • Sotnikov V.T.
  • Chernikov V.V.
 RU2017170C1
MANUFACTURING TECHNIQUE FOR PARATERPHENYL MONOCRYSTAL BASE SCINTILLATION DETECTORS 1990
  • Sotnikov V.T.
  • Andrjushchenko L.A.
  • Gershun A.S.
  • Budakovskij S.V.
  • Gritsan V.A.
 SU1715068A1
CESIUM IODIDE-BASED SCINTILLATION MATERIAL AND METHOD OF PREPARATION THEREOF 1997
  • Vinograd Ehduard L'Vovich
  • Goriletskij Valentin Ivanovich
  • Kovaleva Ljudmila Vasil'Evna
  • Korsunova Sof'Ja Petrovna
  • Kudin Aleksandr Mikhajlovich
  • Mitichkin Anatolij Ivanovich
  • Ivanova Aleksandra Nikolaevna
  • Protsenko Vladimir Grigor'Evich
  • Shakhova Klavdija Viktorovna
  • Shpilinskaja Larisa Nikolaevna
 RU2138585C1
SCINTILLATION UNIT 0
  • Surkov Yu.A.
  • Diament L.R.
  • Sobornov O.P.
  • Egorova E.E.
 SU1102359A1
SCINTILLATION DETECTOR 1990
  • Grinev B.V.
  • Jankelevich V.L.
  • Litichevskij A.M.
  • Trofimenko V.V.
  • Andrjushchenko L.A.
 SU1709830A1
SCINTILLATION DETECTOR 0
  • Diament Leonid Rafailovich
  • Shcheglov Oleg Pavlovich
  • Vojlov Yurij Grigorevich
  • Karpov Vadim Semenovich
  • Komarov Boris Vladimirovich
 SU1742756A1
OPTICAL COMMUNICATION ELEMENT OF SCINTILLATION DETECTOR 0
  • Andryushchenko L.A.
  • Yankelevich V.L.
  • Gershun A.S.
  • Zaslavskij B.G.
  • Nikulina R.A.
  • Yuzhelevskij Yu.A.
  • Lebedeva Z.S.
  • Tsitil L.A.
 SU1614676A1
IONIZING RADIATION DETECTOR 2022
  • Tkacheva Tatyana Vasilevna
 RU2795377C1
ELEMENT OF OPTIC COMMUNICATION OF SCINTILLATION DETECTOR 0
  • Andryushchenko L.A.
  • Gershun A.S.
  • Grinev B.V.
  • Sotnikov V.T.
  • Shitsel L.A.
  • Lebedeva Z.S.
  • Yuzhelevskij Yu.A.
 SU1685171A1
SCINTILLATION DETECTOR 0
  • Yankelevich V.L.
  • Andryushshenko L.A.
  • Gershun A.S.
 SU1477106A1

SU 1 746 698 A1

Authors

Andrjushenko L.A.

Grinev B.V.

Sotnikov V.T.

Gershun A.S.

Nikulina R.A.

Kakhidze G.P.

Juzhelevskij Ju.A.

Lebedeva Z.S.

Dates

1994-01-15—Published

1990-06-11—Filed

read Similar patents