FIELD: measurement technology. SUBSTANCE: beam of light of illuminator diffracts on blind 4 after output butt of light guide 1. Position of first diffraction maximum is found with the help of position-sensitive instrument 5. After this alignment chuck 3 is turned through 360 deg and amplitudes of linear movements of first diffraction maximum is fixed with the aid of position-sensitive instrument 5. Linear displacement of output butt of light guide 1 is carried out by means of alignment chuck 3 till minimal amplitude of linear movement of first diffraction maximum is obtained. Change of intensity of first diffraction maximum with turn of output butt of light guide through 360 deg is found with the use of position-sensitive instrument 5. Angular displacement of output butt of light guide 1 is performed by means of alignment chuck 3 till minimal changes of amplitude of first diffraction maximum are obtained with turn of light guide through 360 deg. EFFECT: increased precision of alignment thanks to enhanced accuracy of measurement of misalignment value by analysis of contrast diffraction pattern. 2 dwg
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Authors
Dates
1995-04-10—Published
1989-03-09—Filed