BOLOMETER MANUFACTURING PROCESS Russian patent published in 1997 - IPC

FIELD: measurement of heat radiation fluxes; heat radiation detectors operating low temperatures. SUBSTANCE: superconducting-film detector pad is formed on insulating substrate and the latter is fixed on three-dimensional heat-transfer base; material is extracted from three-dimensional base, the latter is connected to insulating substrate is reduced by any desired method to form membrane above cavity wherefrom material has been extracted so as to form detector pad. To this end, prior to evaporating superconducting film, two substrate components are prepared, maybe from different materials or from same material cut into two parts. Material is extracted in three-dimensional base to form through hole perpendicular to cut plane or grooves, surface of each part is ground or polished on cut side, and both parts are joined together by optical contact method. Then second part is ground, polished on external side, thinned to definite degree thereby forming membrane. EFFECT: enlarged functional capabilities of bolometer produced by using this method. 1 dwg