ELECTRIC DEVICE FOR ENERGY AND ANGULAR ANALYSIS OF CHARGED PARTICLES Russian patent published in 1995 - IPC

FIELD: instrumentation engineering. SUBSTANCE: existing devices do not allow measurement of distribution of charged particles by angle and energy to be carried out during one exposure which is implemented in proposed device and results in enhanced sensitivity and in improved resolving power. Device has two coaxial conical electrodes 1 and 2 placed in series, input and output slits 7 and 8 in the form of truncated cone positioned on second electrode 2 put inside first one, focusing system 6 located inside second electrode of analyzer, third and fourth coaxial conical electrodes 3 and 4 with certain opening angles and slits 9 and 10 and multichannel two-coordinate detector 11 mounted external to electrodes in plane perpendicular to axis of device. EFFECT: expanded operational capabilities, reduced time of analysis. 1 dwg, 1 tbl