CHARGED-PARTICLE SPECTROMETER Russian patent published in 1997 - IPC

FIELD: electronic and ionic spectroscopy of surfaces of solid bodies or gases. SUBSTANCE: spectrometer has axisymmetric energy analyzer in the form of electrostatic mirror with symmetry axis Z, planar position-sensing detector perpendicular to axis Z, and specimen whose center of emission region is on axis Z. Field-setting electrodes are in the form of two electrically isolated coaxial annular conical surfaces having common top. Input and output annular apertures are cut in internal electrode so that their boundaries are in planes perpendicular to axis Z. Input aperture is narrower that output one and is closer to common top of cones. Center of emission source is on axis in central plane of input aperture. Responding surface of position-sensing detector is at greater distance from top of cones than any plane limiting size of diaphragms towards points of intersection between these planes and axis Z. EFFECT: provision for simultaneous recording of emission spectra of particles escaping source in any direction near definite plane perpendicular to axis Z. 2 dwg