ELECTROSTATIC SPECTROMETER FOR ENERGY AND ANGULAR ANALYSIS OF CHARGED PARTICLES Russian patent published in 1995 - IPC

FIELD: analysis of substance surfaces. SUBSTANCE: charged particle spectrometer has two coaxial conical electrodes 1 and 2, used for energy dispersion of particles, and focusing system 8 located between the source of charged particles and electrodes. Due to the fact that the focusing system features the same axial symmetry as electrodes 1 and 2, and the axes of the focusing system and electrodes coincide, provision is made for analysis of angular distributions of charged particles simultaneously with their energy analysis. EFFECT: enhanced sensitivity to energy, angular and spatial resolution. 1 tbl, 1 dwg