METHOD OF POLY-PARA-XYLYLENE COATING PRODUCING Russian patent published in 1996 - IPC

Abstract SU 1830915 A1

FIELD: polymeric coating. SUBSTANCE: polymeric coating on silicon-base is produced by di-p-xylylene pyrolysis. Volatile impurities content is 0.5%, rupture strength is 650 kg/cm², water-absorption is 0.02%, specific volume resistance is 7•10¹⁵ Om•cm. Method involves the elimination of impurities from the parental product by di-p-xylylene and volatile impurities elimination under vacuum at 100-120 C followed by passing sublimated substance through the sublimation unit heated to 80-87 C, precipitation of di-p-xylylene on it and simultaneous pumping out nonprecipitated volatile impurities. Product can be used in electronic, radiotechnic and chemical industry. EFFECT: improved properties of product. 2 dwg, 2 tbl

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SU 1 830 915 A1

Authors

Shirshova V.A.

Ogorodnij A.L.

Kochkin V.F.

Guryshev V.N.

Dates

1996-04-27—Published

1989-02-20—Filed