DEVICE FOR TREATING FLUOROAMMONIUM SILICON-CONTAINING PRODUCTS Russian patent published in 2004 - IPC

Abstract RU 2233694 C1

FIELD: sublimation.

SUBSTANCE: device has sublimator provided with the cover, desublimator, and chamber for catching gas products connected in series to form a pressure-tight system as well as heating members with independent blocks for control of temperature, which embrace the sublimator and desublimator. A baffle with an opening is interposed between the sublimator and desublimator. The sublimator has a mean for supplying raw material, which is made of a chamber-evaporator mounted in the sublimator for horizontal movement and provided with detachable cover having deflector projecting out of the chamber-evaporator and fitting on the baffle above the opening. The desublimator is provided with the discharging port and additionally provided with the perforated shield in front of the baffle opening.

EFFECT: enhanced efficiency.

5 cl, 1 dwg

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RU 2 233 694 C1

Authors

Isjangulov S.Z.

Savel'Ev S.B.

Pupyshev A.A.

Mel'Nichenko E.I.

Ehpov D.G.

Dates

2004-08-10Published

2003-08-07Filed