FIELD: microelectronics. SUBSTANCE: ceramic surface to be coated is activates by implanting ions of 1 - 40 amu accelerated to the energy of 50 - 150 KeV followed by applying a gas-phase cyclodi-p-xylylene by the process of pyrolytic polymerization. EFFECT: efficient sealing of boards, cards and integrated circuits. 2 tbl
| Title |
Year |
Author |
Number |
| DEVICE FOR APPLICATION OF MULTI-LAYER CURRENT-CONDUCTING COATS ON ARTICLES MADE FROM DIELECTRIC MATERIALS AND ION SOURCE FOR THIS DEVICE |
2004 |
- Krivobokov V.P.
- Asainov O.Kh.
- Anan'In P.S.
- Legostaev V.N.
- Mikhajlov M.N.
- Bainov D.D.
- Judakov S.V.
- Zorkal'Tsev A.A.
- Pashchenko O.V.
- Kositsyn L.G.
|
RU2261289C1 |
| METHOD FOR PROCESSING THE BEAM OF NEUTRAL PARTICLES BASED ON THE TECHNOLOGY FOR PROCESSING THE BEAM OF GAS CLUSTER IONS AND OBTAINED BY SUCH AS A PRODUCT |
2013 |
- Kirkpatrik, Shon, R.
- Kirkpatrik, Allen, R.
- Uolsh, Majkl, Dzh.
|
RU2648961C2 |
| METHOD AND APPARATUS FOR NEUTRAL BEAM PROCESSING BASED ON GAS CLUSTER ION BEAM TECHNOLOGY |
2011 |
- Kirkpatrik Shon R.
- Kirkpatrik Allen R.
|
RU2579749C2 |
| METHOD FOR PRODUCTION OF THE COATINGS HAVING THE STRONG ADHESION |
2003 |
- Kunts Martin
- Bauer Mikhaehl'
- Baranjai Andreas
- Makor Dzhordzho
|
RU2301117C2 |
| INTERPENETRATING ELASTOMER MESH MADE FROM PARTICLES OF GROUND TIRE RUBBER |
2018 |
|
RU2813462C2 |
| INTERPENETRATING ELASTOMER MESH OBTAINED FROM GRINDED TIRE RUBBER PARTICLES |
2018 |
|
RU2808731C1 |
| LOCAL VASCULAR DELIVERY OF PROBUCOL, ALONE OR IN COMBINATION WITH SIROLIMUS, FOR TREATMENT OF RESTENOSIS, VULNERABLE PLAQUES, AAA (ABDOMINAL AORTA ANEURISM) AND STROKE |
2008 |
- Falotiko Robert
- Chzhao Dzhonaton Z.
|
RU2481084C2 |
| MONITORING SYSTEM BASED ON ETCHING OF METALS |
2009 |
|
RU2507516C2 |
| DEVICE FOR LOCAL AND/OR REGIONAL DELIVERY USING LIQUID FORMULATIONS OF THERAPEUTICALLY ACTIVE SUBSTANCES |
2009 |
|
RU2596092C2 |
| NOVEL BINDING AGENT SYSTEMS |
2014 |
- Valter Burkkhard
- Fajkhtenshlager Bernkhard
- Velfle Khajmo
- Brukhmann Bernd
- Smets Alfons
|
RU2675555C2 |
