FIELD: semiconductor technology. SUBSTANCE: process relates to production of structural graphite materials used in semiconductor technology and other branches of industry. Process includes grinding of coke of isotropic structure to obtain particles of isotropic shape, mixing it with binding pitch. Compacted powder is oxidized and articles are pressed out of powder. Manufactured articles are subjected to thermal treatment and are impregnated with pitch under pressure for the course of time established depending on diameter of article, penetrability and porosity of material. EFFECT: increased homogeneity of structure, improved isotropic properties. 9 cl
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Authors
Dates
1994-01-30—Published
1992-03-27—Filed