FIELD: plasma generation. SUBSTANCE: gas neutralizer is built on basis of two contrary mounted vacuum turbo-molecular pumps with two ball rotors having mutually perpendicular axes of rotation. Gas delivery pump is provided with stationary gate installed in feed slot of central rotor shielding working space of slot from surface of outer rotor. EFFECT: improved quality of neutralization. 1 dwg
| Title | Year | Author | Number |
|---|---|---|---|
| GAS NEUTRALIZER OF ION BEAM | 0 |
|
SU1625256A1 |
| ULTRACENTRIFUGE | 1992 |
|
RU2041742C1 |
| GAS ION NEUTRALIZER | 1978 |
|
SU963441A2 |
| DEVICE FOR NEUTRALIZING ION BEAM | 1975 |
|
SU544303A1 |
| OPTICO-ELECTRON METER OF ANGLE OF TURN OF ALIDADE | 1994 |
|
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| ACOUSTIC ANGLE SENSOR | 1990 |
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| OPTICAL-ELECTRONIC DEVICE WHICH MEASURES POSITION OF ANGLE METER DIAL | 1992 |
|
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| ELECTRO-OPTIC WIDE-RANGE LINEAR SHIFTS METER | 1993 |
|
RU2069309C1 |
| MOLECULAR VACUUM PUMP | 0 |
|
SU1537896A1 |
| LINEAR INTERPOLATOR | 1991 |
|
RU2028665C1 |
