FIELD: instrumentation engineering, microelectronics. SUBSTANCE: heating is conducted by electron beam in air with specific power 15-150Vt/cm2 for 10-300 s. Cooling up to 400 C is performed in the course of 50-250 s. EFFECT: facilitated manufacture. 1 tbl
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Authors
Dates
1994-05-30—Published
1990-05-21—Filed