METHOD OF EVACUATION OF GASES AND VACUUM PUMP FOR REALIZATION OF THIS METHOD Russian patent published in 1997 - IPC

Abstract RU 2079000 C1

FIELD: vacuum engineering. SUBSTANCE: travelling wave is excited in rotor wall (diaphragm) by means of piezoelectric wave generator and parameters (mainly frequency and amplitude of wave) are set in accordance with definite relationships. Device has metal diaphragm whose thickness does not exceed 0.3 mm at specified length of evacuation passage in accordance with respective mathematical expression. Device makes it possible to obtain pressure of 10^-5 Pa in high-vacuum area at evacuation rte of 1 l/s. EFFECT: high rate of evacuation and compression due to enhanced efficiency of conversion of energy of travelling wave into translational motion of gas. 5 cl, 2 dwg

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RU 2 079 000 C1

Authors

Makarov A.A.

Luskinovich P.N.

Ryzhikov I.A.

Dates

1997-05-10—Published

1994-07-01—Filed