FIELD: protection of superclean surfaces. SUBSTANCE: method involves supplying superclean medium into housing; forming laminar flow within housing. Device has hollow housing with inlet opening, unit for forming laminar flow and permeable partition with smoothly varying flow resistance. Partition allows flow rate in laminar flow across its height perpendicular to flow distribution direction to be smoothly varied. EFFECT: increased efficiency of protection of superclean surfaces. 10 cl, 6 dwg
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