FIELD: analytical instrument engineering. SUBSTANCE: particles, sputtered from material, are ionized for subsequent analysis and measurement of their mass-spectrum, as well as energy distributions of particles to be analyzed are measured. Fraction of atoms of preset sort may be measured correctly, when these atoms are converted into ions. Concentration of any component may be calculated. Mass-spectrometry of sputtered particles may be used in electronics and chemical industry due to high sensitivity. EFFECT: improved precision of measurement. 1 dwg
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