FIELD: analysis of materials. SUBSTANCE: method involves the steps of: irradiating a specimen to be investigated with particles having a predetermined atomic number and collision energy E and recording particles scattered at predetermined angle θ including multiple ionized particles. Irradiation and recording parameters are selected from conditions of creating internal vacancy in a scattered particle so as to control charged component output and to enhance it. The method is characterized in that selective sensitivity to predetermined atoms is obtained due to limiting conditions of irradiation and recording and due to recording multiple ionized particles. EFFECT: enhanced accuracy and reliability. 7 cl, 3 dwg, 1 tbl
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