FIELD: study of materials with determination of their physical properties. SUBSTANCE: method includes probing of surface of material with medium-energy electrons. Current of probing electrons should not exceed 100 nA, section of spectrum is measured under mode of counting of individual electrons in undifferentiated from within range of energy loss from 0 < delta E < 4D eV, relation of intensity of section delta of spectrum Ean < delta E < 4 eV where delta Ean is energy resolution of spectrometer to intensity of peak of elastically scattered electrons delta E=0 eV is found. EFFECT: enhanced reliability of method. 3 dwg
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