METHOD OF ANALYSIS OF QUANTITATIVE COMPOSITION OF SURFACE OF SOLID BODY Russian patent published in 1996 - IPC

FIELD: physical. SUBSTANCE: in accordance with method of analysis of quantitative composition of surface of solid body surface is irradiated with beam of atom or ions, mass spectrum of pulverized particles is registered and content of elements is determined by intensity if lines of mass spectrum. In this case atomic number of particles ob beam, correlation diagrams of molecular orbitals and conditions for creation of internal vacancy in pulverized particle are taken into account. Choice of energy of particles and of pulverization angle on basis of given analytical expressions provide for creation of internal vacancy in pulverized particle which makes it possible to increase ionization degree of pulverized particles and to provide for its strict monitoring. EFFECT: increased ionization degree of pulverized particles, provision for strict monitoring of ionization. 2 dwg