FIELD: physics.
SUBSTANCE: solid body surface is irradiated by primary electron beam, and power spectrum of electrons escaped from solid body is registered. Note here that solid body surface with is sequentially irradiated by electron beam with stepwise increased in power in the range of (100-10000) eV to register absolute differential coefficients of electron elastic dissipation for each power magnitude in the range of dissipation angles of 90°-180° at the number of angles corresponding to that of elements in solid body. Thereafter, mean concentrations of elements in escape zone and zone depth are calculated to determine distribution of concentrations over solid body surface layer.
EFFECT: determination of concentration in nano range without destructing analysed layer.
3 dwg
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