INERTIAL PRIMARY INFORMATION SENSOR Russian patent published in 1994 - IPC

FIELD: measurement technology. SUBSTANCE: sensor has housing 1 with base 2, first plate 3 with inner frame 4 fixed in the housing, second, second plate which inner frame 7 is attached to frame 4, second plate having outer frame. First plate 3 is coupled with housing 1 with the aid of elastic jumpers 5, first plate thickness being greater than second one. The two plates are fabricated of a single crystal silicon. There are electrodes of power converters, electrodes of position sensor, angular velocity sensor and electrodes of accelerometer located on the frames. EFFECT: enhanced accuracy and reliability. 5 cl, 8 dwg