COMPENSATION ACCELEROMETER Russian patent published in 2015 - IPC G01P15/13 

FIELD: measurement equipment.

SUBSTANCE: accelerometer comprises a body, the first plate from single-crystal silicon with mobile and fixed parts and elastic links that connect them along the suspension axis, a differential capacitance position converter with two fixed electrodes on the second plate, the third plate, a magnetoelectric power converter with a permanent magnet and a compensation coil installed on two supports on the mobile part, a weight on the mobile part, an amplifier. To minimise angular deformation of the mobile part in the first plate when exposed to temperature, there are slots made symmetrically on it in the area of location of supports installed symmetrically relative to the axis of suspension.

EFFECT: increased accuracy of acceleration measurement.

5 cl, 5 dwg