FIELD: optics. SUBSTANCE: method of aligning interferometer involves sequentially scanning an interferometer in at least two positions by monochromatic collimated light beam of a diameter of no more than 0.2 of an interferometer aperture diameter in a plane extending through an interferometer axis, with an incidence angle being maintained constant, regulating parallelism of the plates of interferometer in the direction of scanning from intensity drop in end points. EFFECT: enhanced accuracy. 2 cl, 2 dwg
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Authors
Dates
1994-08-30—Published
1991-03-26—Filed