DEVICE FOR FOCUSING OPTICAL RADIATION ONTO OBJECT Russian patent published in 2006 - IPC G02B23/00 

Abstract RU 2289153 C1

FIELD: optical instrument engineering; optical guidance systems.

SUBSTANCE: device has the following units disposed along path of laser beam: beam-splitting plate, focusing objective, object holder and device for inspecting focusing, namely telescope. The latter is placed at back stroke of beams. Unit for registering focal volume is mounted for movement in perpendicular to optical axis and along the optical axis. Unit has transparent test object, tightly fixed to manipulator, magnifying micro lens which provides high spatial resolution, and radiation intensity meter made of array photodetector and signal processing unit. Surfaces of test object and of detector are disposed in conjugated planes.

EFFECT: improved precision of focusing.

3 cl, 1 dwg

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RU 2 289 153 C1

Authors

Borodin Vladimir Grigor'Evich

Lopato Aleksej Vladimirovich

Filippov Vladimir Gennad'Evich

Ospennikova Sof'Ja Naumovna

Ignat'Ev Georgij Nikolaevich

Andrianov Vasilij Petrovich

Dates

2006-12-10Published

2005-07-04Filed