ASSEMBLY OF CONTROL AND REPRESENTATION ELECTRODES FOR LIQUID-CRYSTAL SCREEN AND METHOD OF PRODUCTION Russian patent published in 1994 - IPC

FIELD: semiconductor engineering. SUBSTANCE: space between tantalum electrodes is filled with layer of porous aluminium oxide, onto which transparent electrodes of representation elements are made. Total thickness of layer of porous aluminium oxide and transparent representation electrodes is equal to thickness of strip tantalum electrodes, covered with dielectric layer. The second electrodes of non-linear elements are made of aluminium. According to the method of producing active array of non-linear elements which have metal-dielectric-metal structure, used for controlling operation of liquid-crystal screens, array of the second electrodes is formed by application of photoresistive layer onto tantalum electrodes formed. Then photoresist is exposed from the back side of isolating substrate. Photoresistive mask is formed according to profile of strip tantalum electrodes. Aluminium layer is applied onto structure have been formed. Explosion photolithography is performed, that results to removal of aluminium layer disposed above strip tantalum electrodes. Then photolithography operation is carried out according to relief of the second electrodes of non-linear elements. Aluminium layer is oxidized electrochemically according to formed relief in electrolyte, made on the base of phosphoric acid. EFFECT: improved efficiency. 2 cl, 9 dwg