DEVICE FOR CONTROL OVER TECHNOLOGICAL PROCESS OF REMOVAL OR APPLICATION OF TRANSPARENT OF SEMI-TRANSPARENT COATS Russian patent published in 1994 - IPC

Abstract RU 2019888 C1

FIELD: electronics. SUBSTANCE: device includes control system with matching elements and computer system enabling current value of speed of technological process and thickness of applied or removed coats to be determined by continuously comparing them with preset values in agreement with specified mathematical model. EFFECT: improved efficiency in manufacture of microcircuits. 2 cl, 2 dwg

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RU 2 019 888 C1

Authors

Кhajnatskij А.S.

Dates

1994-09-15—Published

1990-08-24—Filed