METHOD OF DETERMINING PRESENCE OF DISORDERED PHASE IN CRYSTALS OF SEMICONDUCTORS Russian patent published in 1994 - IPC

Abstract RU 2019891 C1

FIELD: inspection of parameters of semiconductor materials. SUBSTANCE: Raman scattering spectra onto photons are indicated when wave vector of incident light is directed along optical axis; polarization spectra are indicated in perpendicular to the axis; and scattered radiation is indicated at the same polarization in opposite direction. Raman scattering line A1 is indicated as well. The second spectrum of Raman scattering is achieved when wave vector of incident light is directed in perpendicular to optical axis and at polarization along the axis and scattered radiation is indicated in direction, being perpendicular as to direction of wave vector of incident light, and optical axis at polarization which coincide with direction of wave vector of incident light. Raman scattering line E1 is indicated either. After the half-width of the lines is measured and broadening is calculated, provided by presence of disordered phase and its value. EFFECT: improved reliability; improved efficiency. 1 dwg

Similar patents RU2019891C1

Title Year Author Number
METHOD OF MEASUREMENT FOR CONTROL OF HYDROGEN IN SOLID-STATE MATERIAL 2013
  • Volodin Vladimir Alekseevich
  • Kamaev Gennadij Nikolaevich
  • Antonenko Aleksandr Kharitonovich
  • Koshelev Dmitrij Igorevich
RU2531081C1
METHOD OF ELEMENT-WISE ANALYSIS OF SURFACE MONOLAYER OF MATERIALS 1991
  • Gordeev Ju.S.
  • Zinov'Ev A.N.
RU2008655C1
METHOD TO ANALYSE MULTI-COMPONENT GAS MEDIA 2012
  • Buldakov Mikhail Arkad'Evich
  • Matrosov Ivan Ivanovich
  • Petrov Dmitrij Vital'Evich
RU2499250C1
METHOD OF ANALYSIS OF QUANTITATIVE COMPOSITION OF SURFACE OF SOLID BODY 1993
  • Zinov'Ev A.N.
  • Sinani M.A.
RU2064707C1
METHOD OF DETERMINING REACTIVE INDEX OF FERROELECTRIC CRYSTAL 0
  • Reznik Lev Gershevich
  • Angert Naum Borisovich
  • Kalshtejn Mikhail Lvovich
  • Umarov Bakhtiyar Sultanovich
SU1318858A1
DEVICE FOR DETERMINING PARAMETERS OF CONTINUOUS MEDIA BY LIGHT DISSIPATION METHOD 0
  • Gusev V.K.
  • Kantor M.Yu.
  • Razdobarin G.T.
SU1421072A1
OPTICAL METHOD OF MEASURING VELOCITY OF BODIES 2011
  • Volobuev Andrej Nikolaevich
  • Osipov Oleg Vladimirovich
  • Karlov Aleksandr Vladimirovich
  • Romashova Natal'Ja Aleksandrovna
RU2482500C1
METHOD OF DETERMINING ELLIPSOMETRIC PARAMETERS OF AN OBJECT 1991
  • Kir'Janov A.P.
RU2008652C1
DEVICE FOR DETERMINATION OF PROFILE OF OBJECT SURFACE 1992
  • Drejden G.V.
  • Rejngand N.O.
  • Semenova I.V.
RU2042920C1
COMBINATION LIGHT DIFFUSION SPECTROMETER 0
  • Govorun Dmitrij Nikolaevich
  • Kondilenko Ivan Ivanovich
  • Korotkov Pavel Andreevich
  • Slobodyanyuk Aleksandr Valentinovich
SU894375A1

RU 2 019 891 C1

Authors

Vlasov Ju.А.

Fedorov D.L.

Dates

1994-09-15Published

1991-06-26Filed