METHOD OF DETERMINING ELLIPSOMETRIC PARAMETERS OF AN OBJECT Russian patent published in 1994 - IPC

FIELD: ellipsometry. SUBSTANCE: known reference part is split out of radiation beam of polarized electromagnetic waves till the beam interacts with tested object. Split reference part and the rest information part of the radiation beam are separated after the latter interacted with the object to four reference and information beams correspondingly with different types of polarization being identical for corresponding reference and information beams. Intensity of these beams are measured and three ellipsometric parameters are determined in situ according to their relations (modules and phase shifts for refractivities, component of radiation with orthogonal linear p- and n-polarizations). Known reference part of the beam is split out of the beam before it interacts with an object is performed and constancy of relations between amplitudes and phases of the beam for components of radiation is provided in above mentioned reference and information parts of the radiation beam before interaction with the object. EFFECT: improved precision. 4 cl, 1 dwg