PROCESS OF MANUFACTURE OF INTEGRATED CIRCUITS Russian patent published in 1994 - IPC

Abstract RU 2023329 C1

FIELD: electronics. SUBSTANCE: in process of manufacture of integrated circuit orientation of crystal with protrusions of base of mould is accomplished by base elements of outlet frame. Crystal is fixed under pressure not exceeding pressing pressure. Cone holes for coupling with attachment end of outlet frame are formed with potting of crystal. Workstock is cleaned by plasma-chemical machining. Protective coat is applied after deposition of film conductors. EFFECT: increased output of good articles. 5 cl, 4 dwg

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RU 2 023 329 C1

Authors

D'Jakov Ju.N.

Sanderov V.L.

Tsarev V.N.

Popov A.A.

Eremeev M.P.

Morozov V.V.

Dates

1994-11-15Published

1990-03-23Filed