EVAPORATOR Russian patent published in 1995 - IPC

FIELD: vacuum engineering. SUBSTANCE: evacuator has crucible with cover provided with central bore, crucible heater, vapor flow generator in the form of conical nozzle, crucible conveying mechanism, nozzle heater in the form of electromagnet coil with conical central bore in coil former, all mounted in vacuum chamber; coil is mounted on crucible coaxially with it and functions as its cover. Conical nozzle is formed by inner surface of coil former and outer surface of controlled valve installed in central bore of cover and made in the form of truncated cone from heat-resistant magnetic alloy with polished base contacting bottom polished surface of nozzle. Valve base has longitudinal vapor-exit ducts; temperature sensors (thermocouples) are mounted in nozzle and crucible heaters; crucible temperature sensor is installed in longitudinal axial depression of crucible, coil core part abutting valve base has projection contacting bearing surface of valve and providing permanent clearance for vapor exit. EFFECT: improved design. 2 cl, 1 dwg