EVAPORATOR Russian patent published in 1996 - IPC

FIELD: vacuum equipment, particular, devices for application of resist in vacuum. SUBSTANCE: evaporator has additional chamber 18 with reciprocation mechanism 20 of crucible 5 and device for introduction of inert gas 19 and evacuation device 22 communicated with reaction chamber 1 by means of gate 21. Crucible 5 is made of cylinder 6 with sealed cover 7 and steam dissector 11 tightly connected to each other and installed for motion relative to each other. Dissector 11 is made in form of truncated cone with through holes 12. Dissector is connected with locking device engageable with central hole 8 in cover 7 of cylinder 6. Side surface of cylinder 6 has hole 9 to receive plug 10. Steam flow formation device has socket 17 in form of truncated cone to receive steam dissector 11. Located between cylinder 6 and dissector 11 is bellows 13 tightly connected with them. Locking device is made in form of rod with spheres 15 and 16. EFFECT: excluded introduced detects. 3 cl, 1 dwg