EVAPORATOR Russian patent published in 1996 - IPC

FIELD: vacuum deposition apparatuses. SUBSTANCE: evaporator has chamber 1, inlet branch pipe 5 for filling chamber 1 with liquid reactant, particularly styrene, chamber 2 to be vacuumized to 10^-3-10^-5 mm. of mercury column. Liquid reactant is then fed from chamber 1 through pipeline 4 and metering device 3 into chamber 2. Metering device is cut off and liquid reactant is heated to 160-180 C. Vapors generated are delivered into vacuumizer. Each chamber has one branch pipe, chamber 1 is provided with inlet branch pipe and chamber 2 with outlet branch pipe. Chambers are periodically brought into communication one with the other through metering device 3. It allows liquid reactant to be poured into one chamber without interrupting the process. Area ratio of other chamber and outlet opening is 5-7. EFFECT: intensified process and enhanced reliability in operation. 1 dwg