GEAR FOR MACHINING SURFACE OF SAMPLES WITH RADIATION OF SPECTRAL RANGE OF 110-180 NM Russian patent published in 1995 - IPC

Abstract RU 2031471 C1

FIELD: radio engineering. SUBSTANCE: case of radiation source is produced with several windows of rectangular slit shape, each made in the form of one or several plates transparent is spectral range of radiation source. Distances between windows and surface of sample is chosen not less than distance between adjacent windows located in one plane. EFFECT: simplified design, improved operational efficiency. 2 cl, 6 dwg

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RU 2 031 471 C1

Authors

Valiev Kamil' Akhmetovich

Velikov Leonid Vasil'Evich

Dushenkov Sergej Dmitrievich

Dates

1995-03-20—Published

1991-12-04—Filed