ELECTRICAL DISCHARGE VACUUM PUMP Russian patent published in 1995 - IPC

Abstract RU 2034359 C1

FIELD: vacuum engineering. SUBSTANCE: negative-charge electrode is arranged in parallel to side wall of cooled metal case of pump; positive-charge electrode is mounted flush with case surface. Negative electrode may be perforated. Inlet pipe ensures continuous evacuation of spaces. EFFECT: improved design. 3 cl, 1 dwg

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RU 2 034 359 C1

Authors

Lisovoj V.F.

Fesenko Ju.N.

Dates

1995-04-30—Published

1990-05-03—Filed