FIELD: vacuum engineering; electronic instrumentation engineering, micromechanics.
SUBSTANCE: micropump has one discharge section incorporating one titanium anode and two titanium cathodes. Magnetic field acts along axis of this section. First cathode carries conical part protruding from its plane. Second cathode mounts insert. Conical part is made of erbium and insert, of magnesium. Their diffusion by discharge ions is accompanied by growth of whiskers that function to initiate micropump starting in high vacuum. Novelty is replacement of steel anode by titanium one and introduction of additional components characterized in high coefficient of ion diffusion.
EFFECT: enhanced pumping speed and micropump starting speed in high vacuum.
3 cl, 1 dwg
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RU2705839C1 |
| 0 |
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SU337849A1 |
