FIELD: vacuum engineering. SUBSTANCE: device has treatment mechanism, sluice chamber with conveying manipulator, and part handler provided with grips and their displacement drive; part handler has arms for simultaneous removal and rearrangement of parts; its grips and drive are hollow structures in the form of C-shaped flattened tube for energy carrier. Handler can be made in the form of Z-shaped bracket with arms spaced apart. EFFECT: enlarged functional capabilities. 2 cl, 7 dwg
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Authors
Dates
1995-04-30—Published
1992-06-24—Filed