FIELD: process engineering.
SUBSTANCE: invention relates to process engineering and can be used for fabrication of artworks and LC displays (LCD). Proposed device comprises substrate unloading and receiving cartridges arranged on stepwise transfer mechanism, mechanism to unload substrates from cartridge, mechanism to load treated substrates into cartridge, hydromechanical and megasound cleaning units with substrate holders, 1st and 2nd substrate carriers. Device comprises, additionally, 2nd hydromechanical cleaning unit and substrate drying unit. Substrate carriers represent a rod with two vertical supports accommodating vertical row of rolls that feature circular grooves, lead-in chamfers and adjustable inter-row distance. Centers of vertical axes of symmetry of rollers lie on one axis of symmetry of corresponding row, while the rod is furnished with retainer shifted relative to axis of symmetry of vertical supports provided with protective casing. Note here that substrate holders represent also two vertical rollers rows similar to those on substrate carries.
EFFECT: possibility to process large-size substrates, higher quality and efficiency.
2 cl, 19 dwg
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Authors
Dates
2009-09-20—Published
2007-11-12—Filed