DEVICE FOR DOUBLE-SIDED PROCESSING OF PLATES, FOR EXAMPLE, PHOTOMASKS Russian patent published in 2008 - IPC H01L21/00 

FIELD: electricity.

SUBSTANCE: device for double-sided processing of plates, for example, photomasks, consists of the following components installed on the basis - loading and unloading cassettes, mechanisms of their stepwise displacement, the first and second independent transporters, unit of double-sided hydromechanical cleaning of plates, unit of megasound cleaning. At that device is additionally equipped with unit of plates drying with the help of heater, mechanisms of plates extraction from unloading cassette and load of processed plates in loading cassette, equipped with lamellate plate holders and installed with the possibility of alternating motion in horizontal plane, at that the first and second transporters are equipped with plate carriers, which are installed on rods with the possibility of alternating motion in horizontal and vertical plane, unit of double-sided hydromechanical cleaning of plates is equipped with two grips that are installed in rod rocker with the possibility of alternating motion in mutually perpendicular directions, and unit of plates drying consists of plates holder, which is made in the form of four needles with adjustable gap between low side of plate and heater plane.

EFFECT: increase of device functional resources; of its processing quality and reliability.

9 dwg