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2 039 068

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C1

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IPC

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Application

93038247/05, 1993-07-26

(22)

Actual filing date

1993-07-26

(45)

Published

1995-07-09

(72)

Inventor

Mager K.A.Lopatina I.V.Senchenja N.G.Guseva T.I.Gololobov Ju.G.Volkova L.M.Matveeva N.K.

(73)

Holder

Institut Ehlementoorganicheskikh Soedinenij Im.A.N.Nesmejanova Ran

COPOLYMERS OF ESTERS OF 2-CYAN ACRYLIC ACID AND SILICIUM-CONTAINING METHACRYLATES FOR PLASMA RESISTANT RESISTOR SUPERTHIN COATINGS Russian patent published in 1995 - IPC

Abstract RU 2039068 C1

FIELD: molecular electronics. SUBSTANCE: copolymers of esters of 2-cyan acrylic acid and silicium-containing methacrylates having common formula {[-CH2-C(CN)/COOR-]m-[-CH2-C(CH3)-(COOR1)-]n}k where R C2H5-C10H21 CH2-CH=CH2 CH2-CH2-OCH2-CH=CH2 CH2CF2-CF2H CH2COOCH2CF2CF2H CH2COOCH2=CH2 R1 CH2-Si(CH3)2-O-Si-(CH3)3 CH2-Si(CH3)3 CH2CH2CH2CH2-Si(CH3)2-O-Si-(CH3)3, m= 99-1 mol n=1-99 mol k=m+n are prepared by mass or solution copolymerization at 30-100 C. The process takes place in the presence of radical initiators within 3-20 h. Yield of said copolymers is 48-85 EFFECT: improves quality of desired product. 1 tbl

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RU 2 039 068 C1

Authors

Mager K.A.

Lopatina I.V.

Senchenja N.G.

Guseva T.I.

Gololobov Ju.G.

Volkova L.M.

Matveeva N.K.

Dates

1995-07-09—Published

1993-07-26—Filed

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