FIELD: measuring characteristics of semiconductors. SUBSTANCE: device is designed for measuring resistance of structures that have conducting layer which covers non-conducting base. method of measuring involves connection of sample to oscillating circuit which is tuned to achieve resonance. Electrodes of device are shaped plain and have ring space between one another. They are mounted in one plane. EFFECT: contactless measuring and excluded current leakage. 1 dwg
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Authors
Dates
1995-07-20—Published
1992-08-10—Filed