DEVICE AND TECHNIQUE FOR MEASURING SURFACE RESISTANCE OF SEMICONDUCTOR PLATES Russian patent published in 1998 - IPC

FIELD: measurement technology; quality control of semiconductor materials. SUBSTANCE: device has inductance sensor, holding frame with one or more reference specimens, and measuring unit. Measurement procedure includes measurement of signal background value as well as information signals coming from reference and analyzed specimens. Information signals coming from reference specimens are used to calculate correction function, including background signal, for calibration function; surface resistance of analyzed specimen is determined by using these functions and information signal coming from analyzed specimen. EFFECT: extended measurement range enabling taking measurements without re-calibration at high accuracy and proximity. 5 cl, 2 dwg