FIELD: mechanical engineering. SUBSTANCE: plasma device has cathode-ray gun 15, target 20 of plasma-forming material, diffuser 1 coupled by means of small butt base to converging tube 3 and cylindrical chamber 4 with holes 5 and 6. Cylindrical chamber carries chamber 11 with holes 12 for additional pumping out of internal space. Truncated branch pipe 8 which vertex is spatially matched with butt base of diffuser is mounted coaxially to cathode-ray gun. Electron beam 19 which rotates in internal hole of branch pipe hits through branch pipe 8 target 20 and evaporating matter of target in the form of plasma formation revolving relative to electron beam gets inside converging tube. Plasma inside the latter deposits on its walls forming coat of required thickness depending on time of operation of gun 15. EFFECT: improved efficiency and quality of coating. 2 dwg
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Authors
Dates
1995-09-27—Published
1992-11-12—Filed