METHOD AND APPARATUS FOR PRODUCING ALLOYED SILICON MONOCRYSTALS BY CRUCIBLELESS ZONE MELTING Russian patent published in 1995 - IPC

Abstract RU 2049164 C1

FIELD: metallurgy. SUBSTANCE: method involves vacuumizing working chamber; drying atmosphere and equipment of working chamber; melting a zone of basic silicon bar and introducing portions of alloying additive into melted zone middle part at predetermined frequency by nozzle spaced from this zone by a distance of 1.1-1.5 R, where R is radius of monocrystal to be grown. EFFECT: increased efficiency and improved quality of monocrystal. 3 cl, 1 dwg

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RU 2 049 164 C1

Authors

Dudavskij S.I.

Dudchenok V.V.

Osovskij M.I.

Silakov G.I.

Trubitsyn Ju.V.

Fal'Kevich Eh.S.

Chervonyj I.F.

Dates

1995-11-27Published

1992-02-04Filed